Accumulation of Background Impurities in Hydride Vapor...

Japanese Journal of Applied Physics 2013 / 08 Vol. 52; Iss. 8S

Accumulation of Background Impurities in Hydride Vapor Phase Epitaxy Grown GaN Layers

Usikov, Alexander, Soukhoveev, Vitali, Kovalenkov, Oleg, Syrkin, Alexander, Shapovalov, Liza, Volkova, Anna, Ivantsov, Vladimir
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.08jb22
Date:
August, 2013
File:
PDF, 678 KB
english, 2013
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