Modulation of Strain States in GaN Films by a Thin AlN/GaN...

Japanese Journal of Applied Physics 2013 / 08 Vol. 52; Iss. 8S

Modulation of Strain States in GaN Films by a Thin AlN/GaN Superlattice Interlayer Grown on Si(110) Substrates

Shen, Xu-Qiang, Takahashi, Tokio, Kawashima, Hiroyuki, Ide, Toshihide, Shimizu, Mitsuaki, Okumura, Hajime
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.08jb05
Date:
August, 2013
File:
PDF, 510 KB
english, 2013
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