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Characterization of SiCl[sub 4]/N[sub 2] Plasmas
Agarwal, A. S., Berry, V., Alapati, R., Nordheden, K. J.Volume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1860513
File:
PDF, 72 KB
english, 2005