![](/img/cover-not-exists.png)
MEASUREMENT OF NANOMECHANICAL PROPERTIES OF THIN FILMS BY INTEGRATING NANOINDENTATION SYSTEM AND ATOMIC FORCE MICROSCOPE
CHAO, LU-PING, HSU, JOING-SHIUN, LAU, YUNG-DONGVolume:
6
Language:
english
Journal:
International Journal of Nanoscience
DOI:
10.1142/S0219581X07004237
Date:
February, 2007
File:
PDF, 338 KB
english, 2007