Micromachined rectangular-spiral-coil actuator for radio-controlled cantilever-like actuation
Fong, Jeffrey, Xiao, Zhiming, Takahata, KenichiVolume:
226
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2015.02.024
Date:
May, 2015
File:
PDF, 7.45 MB
english, 2015