Contactless evaluation of semi-insulating GaAs wafer...

Semiconductor Science and Technology 1991 / 10 Vol. 6; Iss. 10

Contactless evaluation of semi-insulating GaAs wafer resistivity using the time-dependent charge measurement

Stibal, R, Windscheif, J, Jantz, W
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Volume:
6
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/6/10/008
Date:
October, 1991
File:
PDF, 430 KB
english, 1991
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