The Effect of Al/Pt Interface Reaction on Lead-zirconate-titanate Capacitor and the Optimization of Via Contact for Double Metal Ferroelectric RAM
Hwang, Yoo-Sang, Lee, Jin-Woo, Lee, Sung-Yung, Koo, Bon-Jae, Jung, Dong-Jin, Chun, Yoon-Soo, Lee, Mi-Hyang, Shin, Dong-Won, Shin, Soo-Ho, Lee, Sang-Eun, Kim, Byung-Hee, Kang, Nam-Soo, Kim, Ki-NamVolume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.1332
Date:
March, 1998
File:
PDF, 808 KB
1998