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[IEEE 2014 IEEE International Conference on Big Data (Big Data) - Washington, DC, USA (2014.10.27-2014.10.30)] 2014 IEEE International Conference on Big Data (Big Data) - Big data predictive analtyics for proactive semiconductor equipment maintenance
Munirathinam, Sathyan, Ramadoss, B.Year:
2014
Language:
english
DOI:
10.1109/BigData.2014.7004320
File:
PDF, 1.01 MB
english, 2014