A Sampling Decision System for Virtual Metrology in...

IEEE Transactions on Automation Science and Engineering 2015 / 1 Vol. 12; Iss. 1

A Sampling Decision System for Virtual Metrology in Semiconductor Manufacturing

Kurz, Daniel, De Luca, Cristina, Pilz, Jurgen
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Volume:
12
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2014.2360214
Date:
January, 2015
File:
PDF, 1.68 MB
english, 2015
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