A multivariate process capability index model system

Journal of Semiconductors 2011 / 01 Vol. 32; Iss. 1

A multivariate process capability index model system

Wang, Shaoxi, Wang, Danghui
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Volume:
32
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/32/1/016001
Date:
January, 2011
File:
PDF, 150 KB
english, 2011
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