A replacement of high- k...

Semiconductor Science and Technology 2013 / 08 Vol. 28; Iss. 8

A replacement of high- k process for CMOS transistor by atomic layer deposition

Han, Jin-Woo, Choi, Byung Joon, Yang, J Joshua, Moon, Dong-Il, Choi, Yang-Kyu, Williams, R Stanley, Meyyappan, M
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Volume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/8/082003
Date:
August, 2013
File:
PDF, 367 KB
english, 2013
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