Dynamic Simulation of Electron-Beam-Induced Chargingup of Insulators
Kotera, Masatoshi, Yamaguchi, Kiyoshi, Suga, HiroshiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.7176
Date:
December, 1999
File:
PDF, 413 KB
english, 1999