Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication
Kneer, Emil A., Birnie, Dunbar P., Schrimpf, R. D., Podlesny, J. C., Teowee, G.Volume:
7
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589508220221
Date:
February, 1995
File:
PDF, 1.60 MB
english, 1995