Evaluation of ultraviolet-nanoimprint-lithography release...

Microelectronic Engineering 2015 / 06 Vol. 141

Evaluation of ultraviolet-nanoimprint-lithography release agent properties by using TriboIndenter

Funakoshi, Kota, Tadokoro, Chiharu, Clark, Ian Thomas, Okawa, Toshiro, Taniguchi, Jun, Sasaki, Shinya
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Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.02.007
Date:
June, 2015
File:
PDF, 1.31 MB
english, 2015
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