Photoresist Spray Coating Using a Shield Plate with an Aperture for Uniform Deposition onto Trench-Type Three-Dimensional Microdevice Structures
Kumagai, Shinya, Fukuda, Naoya, Tajima, Hisayoshi, Sasaki, MinoruVolume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.51.02bl04
Date:
February, 2012
File:
PDF, 855 KB
english, 2012