Effect of Structural Properties on Electrical Properties of Lanthanum Oxide Thin Film as a Gate Dielectric
Jun, Jin Hyung, Choi, Doo Jin, Kim, Keung Ho, Oh, Ki Young, Hwang, Chul JuVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.3519
Date:
June, 2003
File:
PDF, 153 KB
english, 2003