Deposition of ODA-PMDA types of polyimide thin film inside...

The Journal of Supercritical Fluids 2015 / 05 Vol. 100

Deposition of ODA-PMDA types of polyimide thin film inside a microscopic-scale space using supercritical carbon dioxide

Haruki, Masashi, Hasegawa, Yumi, Kihara, Shin-ichi, Takishima, Shigeki
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Volume:
100
Language:
english
Journal:
The Journal of Supercritical Fluids
DOI:
10.1016/j.supflu.2015.02.016
Date:
May, 2015
File:
PDF, 8.52 MB
english, 2015
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