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[IEEE 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD) - Perth, Australia (2014.12.14-2014.12.17)] 2014 Conference on Optoelectronic and Microelectronic Materials & Devices - Nanoindentation of Si1−xGex thin films prepared by biased target ion beam deposition
Ge, Ruijing, Hou, Xiaowei, Brookshire, Kirsten, Krishnan, N. Radha, Silva, Dilusha, Bumgarner, John, Liu, Yinong, Faraone, Lorenzo, Martyniuk, MariuszYear:
2014
Language:
english
DOI:
10.1109/COMMAD.2014.7038692
File:
PDF, 107 KB
english, 2014