[IEEE 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD) - Perth, Australia (2014.12.14-2014.12.17)] 2014 Conference on Optoelectronic and Microelectronic Materials & Devices - Long-term stability of ICPCVD a-Si under prolonged heat treatment
Brookshire, Kirsten L., Martyniuk, Mariusz, Dilusha Silva, K. K. M. B., Liu, Yinong, Faraone, LorenzoYear:
2014
Language:
english
DOI:
10.1109/COMMAD.2014.7038680
File:
PDF, 480 KB
english, 2014