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[IEEE 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD) - Perth, Australia (2014.12.14-2014.12.17)] 2014 Conference on Optoelectronic and Microelectronic Materials & Devices - Towards MEMS-based long-wavelength infrared tuneable Fabry-Perot filters
Mao, Haifeng, Martyniuk, Mariusz, Silva, Dilusha, Antoszewski, Jarek, Bumgarner, John, Faraone, LorenzoYear:
2014
Language:
english
DOI:
10.1109/COMMAD.2014.7038677
File:
PDF, 216 KB
english, 2014