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SPIE Proceedings [SPIE The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014) - Xi'an, China (Monday 13 October 2014)] The International Conference on Photonics and Optical Engineering (icPOE 2014) - Research on ultrafast laser polishing monocrystalline-silicon
Tian, Ailing, Asundi, Anand, Liu, Weiguo, Zhang, Chunmin, Li, Xiao Gang, Han, Jun, Xie, Hui, Zhu, PengFeiVolume:
9449
Year:
2015
Language:
english
DOI:
10.1117/12.2075792
File:
PDF, 638 KB
english, 2015