[IEEE 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD) - Perth, Australia (2014.12.14-2014.12.17)] 2014 Conference on Optoelectronic and Microelectronic Materials & Devices - Low temperature through-wafer reactive ion etching for MEMS
Zawierta, Michal, Antoszewski, Jarek, Martyniuk, Mariusz, Keating, Adrian, Dilusha Silva, K. K. M. B., Putrino, Gino, Jeffery, Roger, Faraone, LorenzoYear:
2014
Language:
english
DOI:
10.1109/COMMAD.2014.7038658
File:
PDF, 1.06 MB
english, 2014