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[IEEE 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD) - Perth, Australia (2014.12.14-2014.12.17)] 2014 Conference on Optoelectronic and Microelectronic Materials & Devices - Metrology of holes in gold nano-film using interferometric microscopy
Little, Douglas J., Kane, Deb M.Year:
2014
Language:
english
DOI:
10.1109/COMMAD.2014.7038710
File:
PDF, 131 KB
english, 2014