Atomic layer deposition of MoS 2...

Materials Research Express 2015 / 02 Vol. 2; Iss. 3

Atomic layer deposition of MoS 2 thin films

Browning, Robert, Padigi, Prasanna, Solanki, Raj, Tweet, Douglas J, Schuele, Paul, Evans, David
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Volume:
2
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/2/3/035006
Date:
February, 2015
File:
PDF, 760 KB
english, 2015
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