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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Extra Low-Temperature SiO2 Deposition Using Aminosilanes
Suzuki, Ikuo, Dussarrat, Christian, Yanagita, KazutakaVolume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2721480
File:
PDF, 258 KB
english, 2007