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Large-scale membrane transfer process: its application to single-crystal-silicon continuous membrane deformable mirror
Wu, Tong, Sasaki, Takashi, Akiyama, Masayuki, Hane, KazuhiroVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/12/125003
Date:
December, 2013
File:
PDF, 2.66 MB
english, 2013