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Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laser and matched photopolymer
Teng-Fei, Zhu, Bing-Hui, Tan, Xue-Feng, Pan, Wei-Dong, TaoVolume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/1/014218
Date:
January, 2010
File:
PDF, 921 KB
english, 2010