The preparation of ScAlN(002) alloy thin films deposited on...

Journal of Materials Science: Materials in Electronics 2015 / 4 Vol. 26; Iss. 4

The preparation of ScAlN(002) alloy thin films deposited on Si(100) substrates by DC reactive magnetron sputtering

Zhang, Yao, Zhu, Weixin, Zhou, Dong, Yang, Yixi, Yang, Chengtao
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Volume:
26
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-014-2661-0
Date:
April, 2015
File:
PDF, 2.25 MB
english, 2015
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