Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2014 / 11 Vol. 8; Iss. 6
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Influence of the high-intensity short-pulse implantation of ions on the properties of polycrystalline silicon
Kabyshev, A. V., Konusov, F. V., Remnev, G. E., Pavlov, S. K.Volume:
8
Language:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451014060068
Date:
November, 2014
File:
PDF, 346 KB
english, 2014