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Deposition of Thin Titania Films by Dielectric Barrier Discharge
Shaokui, Xu, Jinzhou, Xu, Xiaobo, Peng, Jing, ZhangVolume:
8
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/8/3/09
Date:
May, 2006
File:
PDF, 54 KB
english, 2006