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In situ Photocurrent Measurements of Thin-Film Semiconductors during Plasma-Enhanced Chemical Vapor Deposition
Nunomura, Shota, Sakata, Isao, Kondo, MichioVolume:
6
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.6.126201
Date:
December, 2013
File:
PDF, 68 KB
english, 2013