Effect of Cations on the Chemical Mechanical Polishing of...

Chinese Physics Letters 2013 / 09 Vol. 30; Iss. 9

Effect of Cations on the Chemical Mechanical Polishing of SiO 2 Film

Song, Han, Wang, Liang-Yong, Liu, Wei-Li, Song, Zhi-Tang
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Volume:
30
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/30/9/098103
Date:
September, 2013
File:
PDF, 724 KB
english, 2013
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