Fatigue Testing of Polycrystalline Silicon Thin-Film...

Japanese Journal of Applied Physics 2012 / 11 Vol. 51

Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

Tanemura, Tomoki, Yamashita, Shuichi, Wado, Hiroyuki, Takeuchi, Yukihiro, Tsuchiya, Toshiyuki, Tabata, Osamu
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.51.11pa02
Date:
November, 2012
File:
PDF, 1.01 MB
english, 2012
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