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Leakage current limit of time domain reflectometry in ultrathin dielectric characterization
Kim, Yonghun, Baek, Seung-heon Chris, Jeon, Changhoon, Lee, Young Gon, Kim, Jin Ju, Jung, Ukjin, Kang, Soo Cheol, Park, Woojin, Lee, Seok Hee, Lee, Byoung HunVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.08LC02
Date:
August, 2014
File:
PDF, 921 KB
english, 2014