Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators for high-speed non-contact atomic force microscopy
Guliyev, E, Volland, B E, Sarov, Y, Ivanov, Tzv, Klukowski, M, Manske, E, Rangelow, I WVolume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/7/074012
Date:
July, 2012
File:
PDF, 1.04 MB
english, 2012