Water soluble and metal-containing electron beam resist poly(sodium 4-styrenesulfonate)
Abbas, Arwa Saud, Alqarni, Sondos, Shokouhi, Babak Baradaran, Yavuz, Mustafa, Cui, BoVolume:
1
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/1/4/045102
Date:
November, 2014
File:
PDF, 613 KB
english, 2014