Deposition pressure effect on the surface roughness scaling of microcrystalline silicon films
Zhi-Li, Zhu, Yan-Li, Ding, Zhi-Yong, Wang, Jin-Hua, Gu, Jing-Xiao, LuVolume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/10/106803
Date:
October, 2010
File:
PDF, 54 KB
english, 2010