A novel batch-processing method for accurate...

Journal of Micromechanics and Microengineering 2013 / 05 Vol. 23; Iss. 5

A novel batch-processing method for accurate crystallographic axis alignment

Han, Jun Hyun, Radhakrishnan, Shankar, Lee, Chung-Hoon
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/5/055017
Date:
May, 2013
File:
PDF, 921 KB
english, 2013
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