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Electrical conductivity of Sc-doped TiO 2 thin film prepared by RF magnetron sputtering
Inoue, Tomohiro, Okumura, Teppei, Shimazu, Yuichi, Sakai, Enju, Kumigashira, Hiroshi, Higuchi, TohruVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JG03
Date:
June, 2014
File:
PDF, 1.04 MB
english, 2014