Fabrication and characterization of compact silicon oxynitride waveguides on silicon chips
Yin, Lianghong, Lu, Ming, Wielunski, Leszek, Song, Weiwei, Tan, Jun, Lu, Yicheng, Jiang, WeiVolume:
14
Language:
english
Journal:
Journal of Optics
DOI:
10.1088/2040-8978/14/8/085501
Date:
August, 2012
File:
PDF, 2.80 MB
english, 2012