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Electron and negative ion dynamics in electronegative cc-rf plasmas
Dittmann, K, Küllig, C, Meichsner, JVolume:
54
Language:
english
Journal:
Plasma Physics and Controlled Fusion
DOI:
10.1088/0741-3335/54/12/124038
Date:
December, 2012
File:
PDF, 1.04 MB
english, 2012