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[IEEE 1998 IEEE Ultrasonics Symposium. Proceedings - Sendai, Japan (5-8 Oct. 1998)] 1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102) - Effect of the sputtering parameters on the growth and piezoelectric properties of zinc oxide thin films
Kutepova, V.P., Hall, D.A.Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/ultsym.1998.762131
File:
PDF, 243 KB
english, 1998