Rapid fabrication and characterization of MEMS Parylene C...

Rapid fabrication and characterization of MEMS Parylene C bellows for large deflection applications

Gensler, H M, Meng, E
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Volume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115031
Date:
November, 2012
File:
PDF, 921 KB
english, 2012
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