In-plane nanoelectromechanical resonators based on silicon...

Nanotechnology 2010 / 04 Vol. 21; Iss. 16

In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

Mile, E, Jourdan, G, Bargatin, I, Labarthe, S, Marcoux, C, Andreucci, P, Hentz, S, Kharrat, C, Colinet, E, Duraffourg, L
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
21
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/21/16/165504
Date:
April, 2010
File:
PDF, 762 KB
english, 2010
Conversion to is in progress
Conversion to is failed