Optimization of the visibility of graphene on poly-Si film...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 6

Optimization of the visibility of graphene on poly-Si film by thin-film optics engineering

Chen, Tao, Mastropaolo, Enrico, Bunting, Andrew, Stevenson, Tom, Cheung, Rebecca
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4758760
File:
PDF, 1.99 MB
english, 2012
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