AlN/SiO2/Si3N4/Si(100)-Based CMOS Compatible Surface...

IEEE Transactions on Electron Devices 2015 / 3 Vol. 62; Iss. 3

AlN/SiO2/Si3N4/Si(100)-Based CMOS Compatible Surface Acoustic Wave Filter With −12.8-dB Minimum Insertion Loss

Kaletta, Udo Christian, Wipf, Christian, Fraschke, Mirko, Wolansky, Dirk, Schubert, Markus Andreas, Schroeder, Thomas, Wenger, Christian
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Volume:
62
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2015.2395443
Date:
March, 2015
File:
PDF, 944 KB
english, 2015
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