Spatial Inhomogeneity of Aluminum Content in Air-Bridged Lateral Epitaxially Grown AlGaN Ternary Alloy Films Probed by Cross-Sectional Scanning Near-Field Optical Microscopy
Ishibashi, Akihiko, Murotani, Hideaki, Yokogawa, Toshiya, Yamada, YoichiVolume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.035604
Date:
February, 2012
File:
PDF, 1.12 MB
english, 2012