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Investigation of Si( h k l )...

Investigation of Si( h k l ) surfaces etched in KOH solutions saturated with tertiary -butyl alcohol

Rola, K P, Zubel, I
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/11/115026
Date:
November, 2011
File:
PDF, 3.55 MB
english, 2011
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