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Model analysis and experimental investigation of the friction torque during the CMP process
Guo, Dongming, Xu, Chi, Kang, Renke, Jin, ZhujiVolume:
32
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/32/3/036002
Date:
March, 2011
File:
PDF, 254 KB
english, 2011