Sputtering yields of Au by low-energy noble gas ion...

Journal of Physics D Applied Physics 2009 / 07 Vol. 42; Iss. 13

Sputtering yields of Au by low-energy noble gas ion bombardment

Ikuse, Kazumasa, Yoshimura, Satoru, Hine, Kiyohiro, Kiuchi, Masato, Hamaguchi, Satoshi
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Volume:
42
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/42/13/135203
Date:
July, 2009
File:
PDF, 538 KB
english, 2009
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